Annealing-assisted SnO2 Thin Film for Selective Hydrogen Gas Sensor
نویسندگان
چکیده
Today, monitoring and classification of hydrogen gas by metal oxide-based sensors are widely studying to improve their selectivity stability. In present work, sensing properties magnetron sputtered deposited pure SnO2 thin films have been studied. The film was on glass substrate as-deposited annealed at 450 °C for 6 hrs. has crystalline tetragonal structure, granular surface morphology non-stoichiometry elemental composition tin oxygen vacancies. A higher response is obtained as compare film.A limit detection (LOD) ~175 ppb estimated film-based sensor. This sensor exhibits fast recovery time 42 s/52 s 50 500 ppm gas, respectively. found highly selective towards H2 in different gases such methane, carbon monoxide nitrogen dioxide.
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ژورنال
عنوان ژورنال: Indian Journal of Pure & Applied Physics
سال: 2023
ISSN: ['0019-5596']
DOI: https://doi.org/10.56042/ijpap.v61i10.319